A radiation-sensitive composition includes: an onium salt compound represented by formula (1); a polymer including a structural unit which includes an acid-dissociable group; and a solvent. A is a monovalent organic group having 1 to 40 carbon atoms; R1 and R2 are each independently a hydrogen atom, a monovalent fluorine-free organic group having 1 to 20 carbon atoms, a cyano group, a nitro group, a hydroxy group, or an amino group, when there are a plurality of R1s and R2s, the plurality of R1s and R2s are the same or different from each other; m1 is an integer of 1 to 8; and Z+ is a monovalent radiation-sensitive onium cation.
- 출원번호 : 19395014
- 출원인 : JSR CORPORATION
- 특허번호 :
- IPC : G03F-007/004(2006.01);C07C-309/05(2006.01);C07C-309/24(2006.01);C07C-317/24(2006.01);C07C-381/12(2006.01);C07D-295/185(2006.01);C07D-321/10(2006.01);C08F-020/22(2006.01);G03F-007/00(2006.01);G03F-007/038(2006.01);G03F-007/039(2006.01);