금속 옥사이드 하이드록사이드 화학을 기초로 한 고해상도 리소그래피(lithography) 패터닝 코팅 형성을 위한 유기 금속 전구체가 기재되어 있다. 상기 전구체 조성물은 일반적으로 온화한 조건하에 수증기 또는 다른 OH 공급원 조성물에 의해 쉽게 가수분해될 수 있는 리간드를 포함한다. 상기 유기 금속 전구체는 일반적으로 비교적 낮은 방사선 선량(radiation dose)에서 고해상도 패터닝에 효과적일 수 있고 EUV 패터닝에 특히 유용한 코팅을 제공할 수 있는, 주석과의 방사선 민감성 유기 리간드를 포함한다. 상기 전구체 조성물은 상업적으로 적합한 조건하에서 쉽게 처리할 수 있다. 현장(in situ) 가수분해 또는 증기 기반 증착(deposition)을 이용한 용액 상(solution phase) 처리로 상기 코팅을 형성할 수 있다.

• 출원번호 : 10-2024-7030752
• 출원인 : 인프리아 코포레이션
• 특허번호 :
• IPC : G03F-007/16;C07F-007/22;G03F-007/004;G03F-007/20;

• 출원번호 : PL2024/000047
• 출원인 : ARONPHARMA SP. Z O.O.
• 특허번호 :
• IPC : A61K-036/185(2006.01);A61K-036/35(2006.01);A61K-036/73(2006.01);A61K-036/736(2006.01);A61P-043/00(2006.01);A61P-039/00(2006.01);

A method of monitoring the performance of an immersion lithographic apparatus, the method comprising: moving a test substrate relative to a liquid confinement structure through a series of test route portions whilst projecting exposure radiation through an immersion liquid onto a photosensitive layer on the test substrate such that the photosensitive layer is exposed; wherein the series of test route portions include a first test route portion and a second test route portion; and the second test route portion is symmetric to the first test route portion.

• 출원번호 : EP2024/075447
• 출원인 : ASML NETHERLANDS B.V.
• 특허번호 :
• IPC : G03F-007/00(2006.01)

Wavefront measurement for multi core optical fibers is described. A multi core optical fiber is configured to conduct radiation from a radiation source to a structure such as a metrology target in one or more layers of a patterned substrate, and diffracted and/or reflected radiation from the metrology target to a radiation sensor. The multi core optical fiber has a length configured to facilitate placement of the radiation source and/or the radiation sensor in a spaced location relative to the patterned substrate. Optical path length differences between a subset of cores in the multi core optical fiber with reflectors are determined for different wavelengths of radiation from the radiation source. The optical path length differences are determined based on path lengths of reflected radiation that impinges on the radiation sensor after passing back through the subset of cores. The optical path length differences indicate wavefront distortion.

• 출원번호 : EP2024/075578
• 출원인 : ASML NETHERLANDS B.V.
• 특허번호 :
• IPC :

A processing system herein includes a processing chamber, a metrology system, and a metrology source. The processing chamber includes a lid assembly, a substrate support assembly, a first wall, a second wall, a bottom, and a viewing port. The first wall, the second wall, and the bottom define a processing volume. The metrology system includes a translation stage and a collimator. The metrology source includes a radiation source and a spectrometer. A method herein includes disposing a substrate on a substrate support in a processing chamber; calculating a baseline reflectivity of the substrate; providing a precursor mixture to the processing chamber from the precursor mixture; forming a plasma in a the processing chamber from the precursor mixture; depositing a film on the substrate from the plasma; measuring a thickness of the film; detecting an endpoint of a deposition process; and stopping the deposition process.

• 출원번호 : US2024/046419
• 출원인 : APPLIED MATERIALS, INC.
• 특허번호 :
• IPC : H01L-021/02(2006.01);H01L-021/67(2006.01);H01J-037/32(2006.01);

• 출원번호 : EP2024/075493
• 출원인 : FRAMATOME
• 특허번호 :
• IPC : G21G-004/06(2006.01);G21G-001/02(2006.01);

• 출원번호 : US2024/046394
• 출원인 : DEEP FISSION, INC.
• 특허번호 :
• IPC : E21B-043/24(2006.01);E21B-041/00(2006.01);G21D-001/00(2006.01);G21C-015/02(2006.01);E21B-033/14(2006.01);

An image processing apparatus includes at least one processor that is configured to: acquire projection images obtained by imaging a subject with radiation at a plurality of angles; reconstruct a plurality of tomographic images from the acquired projection images; detect a structure of interest from the plurality of reconstructed tomographic images; derive a region of the projection image corresponding to the detected structure of interest; and determine, by using the derived region of the projection image, whether or not the tomographic image from which the structure of interest is detected is a tomographic image corresponding to a focal plane of the structure of interest.

• 출원번호 : 18882753
• 출원인 : FUKUDA, Wataru
• 특허번호 :
• IPC : G06V-010/25(2022.01);A61B-006/46(2024.01);A61B-006/50(2024.01);G06V-010/74(2022.01);G06V-010/75(2022.01);G06V-010/98(2022.01);

A radiotherapy system includes a neutron acceptor, an aerosolization device for aerosolizing the neutron acceptor, and an energy beam generator. A method for treating cancer, including: administering to a subject in need thereof an effective amount of an aerosolized neutron acceptor; and irradiating the subject with neutrons. A method for diagnosing cancer, including: administering to a subject in need thereof an effective amount of an aerosolized radioactive agent; and receiving an energy beam signal from the subject. A method for delivering a neutron receptor to a subject during radiation therapy, including aerosolizing the neutron receptor and administering to the subject an effective amount of the neutron receptor.

• 출원번호 : 18882784
• 출원인 : National Tsing Hua University
• 특허번호 :
• IPC : A61N-005/10(2006.01)

A coatings system for improved scratch resistance is provided. The coatings system comprises: 1) a primer comprising a difunctional (meth)acrylate ester monomer, a first multifunctional (meth)acrylate, and a first silane-treated aluminum oxide; and 2) a topcoat comprising a difunctional (meth)acrylate ester monomer, a second multifunctional (meth)acrylate, and a second silane-treated aluminum oxide. Further, the coatings system may be UV curable or another type of radiation curable. A method of preparing the coatings system and an article coated with the coatings system are also described.

• 출원번호 : 18882839
• 출원인 : WINKLE, Bradley J.
• 특허번호 :
• IPC : C09D-135/02(2006.01);C09D-005/00(2006.01);C09D-007/62(2006.01);