A radiation-sensitive composition includes: an onium salt represented by formula (1); a polymer including a structural unit (I) which includes an acid-dissociable group; and a solvent. Q1 and Q2 are each independently a carbon atom or a nitrogen atom, provided that at least one selected from the group consisting of Q1 and Q2 is a carbon atom; W is a monocyclic or polycyclic non-aromatic ring structure of 3 to 40 ring members together with Q1 and Q2, and the formula between Q1 and Q2 represents a single bond or a double bond, R1 is a monovalent organic group having 1 to 20 carbon atoms, a nitro group, a hydroxy group, an amino group, a thiol group, a cyano group, a carboxy group, or halogen atom; m1 is an integer of 0 to 4; and Z+ is a monovalent onium cation.
- 출원번호 : 19317301
- 출원인 : JSR CORPORATION
- 특허번호 :
- IPC : G03F-007/004(2006.01);C08F-020/18(2006.01);G03F-007/00(2006.01);G03F-007/038(2006.01);G03F-007/039(2006.01);