The invention relates to an adjustment method (10) for adjusting a beam caustic (12), in particular a focal position (18), of a laser beam (14) of a laser beam unit (22) having an optical device (52), in particular for generating extreme ultraviolet radiation (EUV), comprising the method steps of: a) ascertaining (24) three beam diameters (26, 32, 36, 40) of the laser beam (14) at three measurement planes (28, 30, 34, 38) positioned along the laser beam propagation direction (16); b) determining (42) the beam caustic (12) of the laser beam (14) by analytically calculating beam propagation parameters of the laser beam (14) on the basis of the three ascertained beam diameters (26, 32, 36, 40); c) ascertaining (46) a laser beam deviation by comparing the beam caustic (12) with a target beam caustic (48) of the laser beam (14); d) adjusting (50) the laser beam unit (22), in particular the optical device (52), according to the ascertained laser beam deviation. The invention also relates to an adjustment system (58) and to a laser beam unit (22).
- 출원번호 : EP2024/078574
- 출원인 : TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
- 특허번호 :
- IPC : G01J-001/42(2006.01);G01J-001/02(2006.01);G01J-001/30(2006.01);H01S-003/00(2006.01);